Title :
Stabilization of the Microwave Plasma Facility (MPF) by a microwave isolator
Author :
Yu, Son-Cheol ; Kamath, Sanmati ; Roth
Author_Institution :
UTK Plasma Sci. Lab., Tennessee Univ., Knoxville, TN, USA
Abstract :
Summary form only given. A microwave isolator and a new tuner have been added to the UTK Microwave Plasma Facility (MPF), an approximately 200-liter steady-state, uniform plasma generated by 2 kW of 2.45 GHz microwave power. The uniform steady state plasma, before the addition of the microwave isolator, had an electron number density of about 6 /spl times/ 10/sup 16// electrons/m/sup 3/ and an electron kinetic temperature of 16 eV. The plasma was difficult to stabilize since the reflected power reacted with the magnetron source, changing its characteristics. The microwave isolator has successfully decoupled the reflected power from the load, thus facilitating the process of tuning the plasma. Additional tuning stubs in the microwave circuit have further enhanced the ease of tuning the plasma and minimizing the amount of reflected power.
Keywords :
plasma production; 16 eV; 2 kW; 2.45 GHz; Microwave Plasma Facility; electron kinetic temperature; electron number density; magnetron source; microwave circuit; microwave isolator; reflected power; tuner; tuning stubs; uniform plasma; uniform steady state plasma; Circuit optimization; Electrons; Isolators; Microwave generation; Plasma density; Plasma properties; Plasma sources; Plasma temperature; Steady-state; Tuners;
Conference_Titel :
Plasma Science, 1993. IEEE Conference Record - Abstracts., 1993 IEEE International Conference on
Conference_Location :
Vancouver, BC, Canada
Print_ISBN :
0-7803-1360-7
DOI :
10.1109/PLASMA.1993.593578