Delta-Doped Si/SiGe Zero-Bias Backward Diodes for Micro-Wave Detection

We report the first directly-measured sensitivity performance of a zero-bias Si-based heterojunction backward detector, which is readily compatible with mainstream silicon technology. A measured sensitivity of 2376 V/W driven from a 50 Omega source at zero-bias has been obtained. A cutoff frequency of 1.8 GHz was extracted with a series resistance of 290 Omega and a junction capacitance of 0.307 pF using a small signal model established to fit the measured S-parameters for a 5 mum diameter mesa device.