Title :
Grating-coupler based low-loss optical interlayer coupling
Author :
Yao, Jin ; Zheng, Xuezhe ; Li, Guoliang ; Shubin, Ivan ; Thacker, Hiren ; Luo, Ying ; Raj, Kannan ; Cunningham, John E. ; Krishnamoorthy, Ashok V.
Author_Institution :
Oracle Labs., Oracle, San Diego, CA, USA
Abstract :
Optical interlayer couplers with 2.8dB insertion loss and 48nm bandwidth were designed and demonstrated in a commercial 130nm SOI CMOS process. 10Gb/s transmission through an interlayer-coupled link showed a power penalty of <;0.1dB.
Keywords :
CMOS integrated circuits; diffraction gratings; integrated optics; light transmission; optical couplers; optical design techniques; optical links; optical losses; silicon-on-insulator; SOI CMOS process; Si; bit rate 10 Gbit/s; grating-coupler; insertion loss; interlayer-coupled link; optical interlayer couplers; power penalty; wavelength 130 nm; wavelength 48 nm; Couplers; Gratings; Optical coupling; Optical device fabrication; Optical fibers;
Conference_Titel :
Group IV Photonics (GFP), 2011 8th IEEE International Conference on
Conference_Location :
London
Print_ISBN :
978-1-4244-8338-9
DOI :
10.1109/GROUP4.2011.6053824