Design of a novel MEMS IDT dual axes surface acoustic wave gyroscope

The configuration of a novel MEMS interdigital transducer (IDT) dual-axis surface acoustic wave (SAW) gyroscope is presented in this paper. There have been an increasing demand for gyroscopes with small size and low cost in military and commercial systems, however rotator gyroscopes, laser gyroscopes, fiber optic gyroscopes, and silicon-based MEMS gyroscopes can´t meet the demand. Although the MEMS IDT SAW gyroscope previously is without a suspended structure, it can only detect the angular velocity of one axis, and two gyroscopes of the kind are used to measure the angular velocity of two axes which can be detected by a MEMS IDT dual-axis SAW gyroscope. The configuration and working principles of the gyroscope were explored. The 95.9 MHz gyroscope sample fabricated on the 128deg YX-LiNbO₃ substrate was primarily designed.