Title :
A general nonlinear Mason model of arbitrary nonlinearities in a piezoelectric film
Author :
Shim, Dong S. ; Feld, David A.
Author_Institution :
Wireless Semicond. Div., Avago Technol., San Jose, CA, USA
Abstract :
The widely used Mason equivalent circuit is an exact 1-dimensional linear acousto-electric solution for a piezoelectric plate of finite thickness. When the nonlinear property of the piezoelectric medium cannot be ignored, an appropriate modification has to be made to the piezoelectric constitutive equations. An exact solution, within the desired numerical accuracy, to the nonlinear acousto-electric problem may be readily obtained from a careful inspection of the Mason model and its governing equations. The resulting nonlinear equivalent circuit consists of a linear Mason circuit for the linear part of the constitutive equations and an additional nonlinear voltage source to each of the acoustic and electrical branches.
Keywords :
bulk acoustic wave devices; equivalent circuits; nonlinear network analysis; piezoelectric thin films; 1-dimensional linear acousto-electric solution; BAW devices; Mason equivalent circuit; arbitrary nonlinearity; electrical branch; nonlinear mason model; nonlinear voltage source; piezoelectric constitutive equation; piezoelectric film; Acoustics; Equations; Equivalent circuits; Harmonic analysis; Integrated circuit modeling; Mathematical model; Power transmission lines;
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0382-9
DOI :
10.1109/ULTSYM.2010.5935834