Title :
Radial vibration of the MEMS disk considering its mounting and electrodes form
Author :
Bogdan, Oleksandr ; Petrishev, -Pleg ; Yakymenko, Yurij ; Ianovska, Iuliia
Author_Institution :
Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
Abstract :
The method of the thin piezoceramic MEMS disk resonator with asymmetric electrodes and supported to the substrate with mounting that has a circular segment form radial oscillation calculation is given in this paper. The zero approximation asymmetric radial vibration of the disk was simulated for case of four beam mounting and tree asymmetric electrodes.
Keywords :
crystal resonators; electrodes; microcavities; micromechanical resonators; piezoceramics; vibrations; beam mounting; circular segment; piezoceramic MEMS disk resonator; radial oscillation calculation; tree asymmetric electrodes form; zero approximation asymmetric radial vibration; Electrodes; Equations; Mathematical model; Micromechanical devices; Resonant frequency; Stress; Vibrations;
Conference_Titel :
Electronics Technology (ISSE), 2011 34th International Spring Seminar on
Conference_Location :
Tratanska Lomnica
Print_ISBN :
978-1-4577-2111-3
DOI :
10.1109/ISSE.2011.6053894
