DocumentCode
1960712
Title
Radial vibration of the MEMS disk considering its mounting and electrodes form
Author
Bogdan, Oleksandr ; Petrishev, -Pleg ; Yakymenko, Yurij ; Ianovska, Iuliia
Author_Institution
Nat. Tech. Univ. of Ukraine KPI, Kiev, Ukraine
fYear
2011
fDate
11-15 May 2011
Firstpage
391
Lastpage
396
Abstract
The method of the thin piezoceramic MEMS disk resonator with asymmetric electrodes and supported to the substrate with mounting that has a circular segment form radial oscillation calculation is given in this paper. The zero approximation asymmetric radial vibration of the disk was simulated for case of four beam mounting and tree asymmetric electrodes.
Keywords
crystal resonators; electrodes; microcavities; micromechanical resonators; piezoceramics; vibrations; beam mounting; circular segment; piezoceramic MEMS disk resonator; radial oscillation calculation; tree asymmetric electrodes form; zero approximation asymmetric radial vibration; Electrodes; Equations; Mathematical model; Micromechanical devices; Resonant frequency; Stress; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Technology (ISSE), 2011 34th International Spring Seminar on
Conference_Location
Tratanska Lomnica
ISSN
2161-2528
Print_ISBN
978-1-4577-2111-3
Type
conf
DOI
10.1109/ISSE.2011.6053894
Filename
6053894
Link To Document