Title :
Fabrication of a stepped shape tip using a self-descending phenomena of meniscus
Author :
Mi-Hyun Kang ; Chang-Sin Park ; Choi, Bo Young ; Lee, Dong-Weon
Author_Institution :
MEMS & Nanotechnol. Lab., Chonnam Nat. Univ., Gwangju
Abstract :
We introduce a novel fabrication method of a tungsten tip for STM applications. It uses a gradual meniscus descending phenomena caused by the thanks of a Teflon structure with the hydrophobicity. The fabricated tungsten tips with high aspect ratio have curvature radius of 20 nm or even less. Good reproducibility is experimentally demonstrated by the use of the new etching system. Finally, field emission behaviors of the fabricated tungsten tips are characterized in a high vacuum condition.
Keywords :
electrochemistry; electrodes; etching; hydrophobicity; materials preparation; scanning tunnelling microscopy; tungsten; STM applications; W; curvature radius; etching system; field emission behavior; gradual meniscus descending phenomena; high vacuum condition; hydrophobicity; scanning tunneling microscope; self-descending phenomena; size 20 nm; stepped shape tungsten tip fabrication; teflon structure; Bioinformatics; Biosensors; Cells (biology); DNA; Fabrication; Genomics; Printing; Probes; Shape; USA Councils; Hydrophobicity; Meniscus; Scanning tunneling microscope; Teflon; Tungsten tip;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-4629-2
Electronic_ISBN :
978-1-4244-4630-8
DOI :
10.1109/NEMS.2009.5068758
