A Flexible Paper-Based Microdischarge Array Device for Maskless Patterning on Nonflat Surfaces

Author

Yao-Jhen Yang ; Cheng-Che Hsu

Author_Institution

Dept. of Chem. Eng., Nat. Taiwan Univ., Taipei, Taiwan

Volume

22

Issue

2

fYear

2013

fDate

Apr-13

Firstpage

256

Lastpage

258

Abstract

This letter presents a simple and economical paper-based device that is able to generate an array of stable Ar microdischarges. This is a dielectric-barrier-discharge device that exhibits filamentary-type features. The device is sustained by an ac voltage with a 550-V amplitude and 10-kHz frequency. Optical emission spectra show that Ar lines dominate the emission, with a trace amount of CH and C₂ emissions. Despite slight damage, the electrode lifetime exceeds 20 min. Results demonstrate that this device is flexible and is able to achieve maskless patterning of hydrophilic patterns on flat and curved glass surfaces.

Keywords

argon; dielectric devices; electrodes; flexible electronics; hydrophilicity; paper; surface discharges; Ar; Optical emission spectra; curved glass surfaces; dielectric-barrier-discharge device; electrode; filamentary-type features; flat glass surfaces; flexible paper-based microdischarge array device; frequency 50 kHz; hydrophilic patterns; maskless patterning; nonflat surface; voltage 550 V; Argon; Arrays; Discharges (electric); Electrodes; Plasmas; Substrates; Surface treatment; Microarray; microdischarge; paper-based device; surface modification;

fLanguage

English

Journal_Title

Microelectromechanical Systems, Journal of

Publisher

ieee

ISSN

1057-7157

Type

jour

DOI

10.1109/JMEMS.2012.2234725

Filename

6407625