Title :
Investigation of dimensions effect on stress of bi-material cantilever beam
Author :
Voicu, Rodica ; Muller, Raluca ; Pustan, Marius
Author_Institution :
IMT-Bucharest, Bucharest, Romania
Abstract :
In this paper we investigate the dimension effect on stress of a set of cantilevers beams which are composed of two different material layers. We studied the induced stress obtained applying a force on the microstructures and its variation function of the residual stress due to fabrication processes. Also we investigated the interdependence of these two stresses. We analyzed the optimum design parameters in order to increase the sensitivity of the microstructures and to decrease the stress in order to avoid the failure of the cantilevers.
Keywords :
beams (structures); cantilevers; continuum mechanics; internal stresses; micromechanical devices; micromechanics; bimaterial cantilever beam; cantilever failure; dimension effect; fabrication processes; induced stress; material layers; microstructure sensitivity; microstructures; optimum design parameters; residual stress; variation function; Force; Gold; Materials; Residual stresses; Sensitivity; Tensile stress;
Conference_Titel :
Electronics Technology (ISSE), 2011 34th International Spring Seminar on
Conference_Location :
Tratanska Lomnica
Print_ISBN :
978-1-4577-2111-3
DOI :
10.1109/ISSE.2011.6053907
