Title :
Tunable Endoscopic MEMS-Probe for Optical Coherence Tomography
Author :
Aljasem, K. ; Werber, A. ; Zappe, H.
Author_Institution :
Univ. of Freiburg, Freiburg
fDate :
Aug. 12 2007-July 16 2007
Abstract :
A novel miniaturized tunable endoscopic MEMS probe employable in an endoscopic optical coherence tomography (OCT) system is presented. The probe consists of a pneumatically-actuated micro-lens and a GRIN lens coupled to an optical fiber. Silicon micromachining using polydimethylsiloxane was used to fabricate the lens. The probe has a diameter of 5 mm. The successful integration of the tunable endoscopic probe with an OCT imager promises to be of value in medical diagnostics, particularly for the early detection of internal tumors and cancers.
Keywords :
bioMEMS; biomedical optical imaging; cancer; endoscopes; fibre optic sensors; gradient index optics; micro-optomechanical devices; microlenses; micromachining; optical fabrication; optical tomography; tumours; GRIN lens; cancers; internal tumors; medical diagnostics; optical coherence tomography; optical fiber; pneumatically-actuated microlens; polydimethylsiloxane; silicon micromachining; size 5 mm; tunable endoscopic MEMS-probe; Biomedical optical imaging; Lenses; Medical diagnosis; Micromachining; Micromechanical devices; Optical coupling; Optical fibers; Probes; Silicon; Tomography; Endoscopic optical coherence tomography; Tunable MEMS probe; micro-lens; polydimethylsiloxane (PDMS);
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373813
