DocumentCode
1961519
Title
Laboratory facilities of the microsystems technology laboratories (MTL) at Massachusetts Institute of Technology
Author
Diadiuk, Vicky
Author_Institution
Massachusetts Inst. of Tehcnol., Cambridge, MA, USA
fYear
2003
fDate
30 June-2 July 2003
Firstpage
36
Lastpage
40
Abstract
MTL is an Interdepartmental Laboratory of the Massachusetts Institute of Technology (MIT ) whose mission is to provide the facilities necessary to carry out research in nano- and microsystems and structures. In accordance with the multidisciplinary nature of microsystems technology, the faculty, staff, and students using MTL are affiliated with the many schools, departments, and centers of MIT.
Keywords
educational institutions; laboratories; micromechanical devices; personnel; Massachusetts Institute of Technology; departments; faculty; interdepartmental laboratory; microsystems technology laboratory; nanostructures; nanosystems; schools; staff; student; Costs; Etching; Fabrication; Laboratories; Lithography; Metrology; Microstructure; Space exploration; Space technology; Sputtering;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial
ISSN
0749-6877
Print_ISBN
0-7803-7972-1
Type
conf
DOI
10.1109/UGIM.2003.1225691
Filename
1225691
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