Title :
Laboratory facilities of the microsystems technology laboratories (MTL) at Massachusetts Institute of Technology
Author_Institution :
Massachusetts Inst. of Tehcnol., Cambridge, MA, USA
fDate :
30 June-2 July 2003
Abstract :
MTL is an Interdepartmental Laboratory of the Massachusetts Institute of Technology (MIT ) whose mission is to provide the facilities necessary to carry out research in nano- and microsystems and structures. In accordance with the multidisciplinary nature of microsystems technology, the faculty, staff, and students using MTL are affiliated with the many schools, departments, and centers of MIT.
Keywords :
educational institutions; laboratories; micromechanical devices; personnel; Massachusetts Institute of Technology; departments; faculty; interdepartmental laboratory; microsystems technology laboratory; nanostructures; nanosystems; schools; staff; student; Costs; Etching; Fabrication; Laboratories; Lithography; Metrology; Microstructure; Space exploration; Space technology; Sputtering;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial
Print_ISBN :
0-7803-7972-1
DOI :
10.1109/UGIM.2003.1225691
