• DocumentCode
    1961673
  • Title

    Integration of SoC and LOC

  • Author

    Li, Zhihong

  • Author_Institution
    National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
  • fYear
    2009
  • fDate
    5-8 Jan. 2009
  • Abstract
    The System-on-a-Chip (SoC) exhibits great promise in the world of microelectronics, while LOC (Lab-on-a-Chip) contributes a great progress for biochemical research. A combination of the semiconductor integrated SoC with LOC is brought in this presentation. We propose a new technology which enables monolithic integration of the self-assembled biological system, the MEMS structure, the microfluidic system, and CMOS electronic circuits together. Utilizing this approach, more functionality is introduced into the SoC, while the LOC becomes more intelligent and controllable. A Post-CMOS fabrication approach that meets the requirements is demonstrated to validate the idea.
  • Keywords
    Biological systems; CMOS technology; Electronic circuits; Integrated circuit technology; Lab-on-a-chip; Microelectronics; Microfluidics; Micromechanical devices; Monolithic integrated circuits; System-on-a-chip;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nano/Micro Engineered and Molecular Systems, 2009. NEMS 2009. 4th IEEE International Conference on
  • Conference_Location
    Shenzhen, China
  • Print_ISBN
    978-1-4244-4629-2
  • Electronic_ISBN
    978-1-4244-4630-8
  • Type

    conf

  • DOI
    10.1109/NEMS.2009.5068791
  • Filename
    5068791