A Thermo-Pneumatically Actuated Tip-Tilt-Piston Mirror

Author

Werber, A. ; Zappe, H.

Author_Institution

Univ. of Freiburg, Freiburg

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

47

Lastpage

48

Abstract

We present a novel, high stroke tip-tilt-piston micro-mirror actuated by thermo-pneumatic forces. A circular silicon mirror plate is mounted on top of three balloons, made of a 50 mum thick elastomer membrane. The balloons are inflated under thermo-pneumatic pressure, thus driving the mirror plate into tip-tilt and piston motion. Very large stroke values of 385 mum as well as tip-tilt angles of 5deg were measured. The triangular arrangement of the balloon actuator yields a high flexibility in mirror motion, including tip-tilt in any direction, and the system is Completely integrated without the need for any external pressure drivers.

Keywords

micro-optomechanical devices; micromirrors; optical design techniques; pneumatic actuators; Si; Si - Element; balloon actuator; circular mirror plate; elastomer membrane; micromirror; mirror design; mirror motion flexibility; silicon mirror plate; size 50 mum; thermopneumatic actuation; thermopneumatic forces; thermopneumatic pressure; tip-tilt-piston mirror; Actuators; Biomembranes; Displacement measurement; Mirrors; Optical interferometry; Pistons; Platinum; Semiconductor device measurement; Silicon; Voltage; Micro-mirror; PDMS; thermo-pneumatics;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373833

Filename

4373833