DocumentCode
1962100
Title
Hands-on MEMS
Author
Frechette, Luc ; Modi, Vijay ; Miller, Florent ; Farmer, K.R.
Author_Institution
Dept. of Mech. Eng., Columbia Univ., New York, NY, USA
fYear
2003
fDate
30 June-2 July 2003
Firstpage
157
Lastpage
160
Abstract
We have developed an innovative MEMS education program that combines virtual fabrication with actual testing of classic MEMS devices. This approach is suitable both for large classes and in university environments that do not have access to large fabrication facilities. Under NSF funding, we are currently refining the curriculum to allow the course to be easily adopted by other schools.
Keywords
educational courses; laboratories; micromechanical devices; virtual instrumentation; MEMS education program; laboratories; virtual fabrication; Defense industry; Educational institutions; Educational programs; Educational technology; Fabrication; Industrial training; Mechanical engineering; Microelectromechanical devices; Micromechanical devices; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial
ISSN
0749-6877
Print_ISBN
0-7803-7972-1
Type
conf
DOI
10.1109/UGIM.2003.1225717
Filename
1225717
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