Author :
Frechette, Luc ; Modi, Vijay ; Miller, Florent ; Farmer, K.R.
Author_Institution :
Dept. of Mech. Eng., Columbia Univ., New York, NY, USA
fDate :
30 June-2 July 2003
Abstract :
We have developed an innovative MEMS education program that combines virtual fabrication with actual testing of classic MEMS devices. This approach is suitable both for large classes and in university environments that do not have access to large fabrication facilities. Under NSF funding, we are currently refining the curriculum to allow the course to be easily adopted by other schools.
Keywords :
educational courses; laboratories; micromechanical devices; virtual instrumentation; MEMS education program; laboratories; virtual fabrication; Defense industry; Educational institutions; Educational programs; Educational technology; Fabrication; Industrial training; Mechanical engineering; Microelectromechanical devices; Micromechanical devices; Testing;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial
Print_ISBN :
0-7803-7972-1
DOI :
10.1109/UGIM.2003.1225717
