Title :
Two-wavelength Grating Interferometry for Extended Range MEMS Metrology
Author :
Toy, M.F. ; Ferhanoglu, O. ; Urey, H.
Author_Institution :
Koc Univ., Istanbul
fDate :
Aug. 12 2007-July 16 2007
Abstract :
Diffraction gratings integrated with MEMS has many applications as they can offer shot noise limited sub-nm displacement detection sensitivities but are limited in range. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range from 105 nm to 1.7 um assuming sensitivity is maintained at >50% of the maximum sensitivity.
Keywords :
diffraction gratings; displacement measurement; light interferometry; micro-optomechanical devices; microsensors; optical sensors; MEMS metrology; diffraction gratings; optical sensors; shot noise limited sub-nm displacement detection; two-wavelength grating interferometry; two-wavelength readout method; wavelength 105 nm to 1700 nm; Diffraction gratings; Frequency measurement; Gunshot detection systems; Metrology; Micromechanical devices; Optical arrays; Optical interferometry; Optical sensors; Sensor arrays; Spectroscopy; Grating interferometry; MEMS metrology; Optical Sensing;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373857
