Title :
Self-Supported Pitch-Variable Guided-Mode Resonant Grating Filters at Telecom Wavelengths
Author :
Kanamori, Y. ; Matsuyama, N. ; Ye, J.-S. ; Hane, K.
Author_Institution :
Tohoku Univ., Sendai
fDate :
Aug. 12 2007-July 16 2007
Abstract :
We fabricate a pitch-variable guided-mode resonant grating filter. The grating is a Si self-supported structure and expanded by opposed comb-drive actuators. The initial grating period of 860 nm is designed for a wavelength-selective filter at telecom wavelengths. By controlling the grating period, the resonant wavelength can be tuned.
Keywords :
comb filters; diffraction gratings; optical communication equipment; optical fabrication; optical filters; optical tuning; comb-drive actuators; guided-mode resonant grating filters; pitch-variable filters; subwavelength gratings; wavelength-selective filter; Actuators; Gratings; Joining processes; Optical filters; Optical sensors; Reflectivity; Resonance; Silicon; Springs; Telecommunications; Guided-mode resonant grating filters; comb-drive actuators; subwavelength gratings; wavelength-selective filters;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373859
