Title :
Effect of a Vertical Stack of Aligned Subwavelength Metal Hole Arrays on Extraordinary Transmission Spectra
Author :
Provine, J. ; Kant, Rishi ; Horsley, David A. ; Howe, Roger T.
Author_Institution :
Stanford Univ., Stanford
fDate :
Aug. 12 2007-July 16 2007
Abstract :
We report on the effect of stacking a pair of metallic subwavelength hole arrays on the extraordinary transmission spectrum. A novel fabrication process was developed to create a self-aligned vertical stack of subwavelength metal gratings with precise control of the separation between the two metal films. For separations within the coupling region of the evanescent surface modes of the metal films, minor sharpening of the transmission filter characteristics was observed.
Keywords :
diffraction gratings; metallic thin films; optical arrays; optical fabrication; surface plasmons; evanescent surface modes; extraordinary transmission spectra; metal films; precise control; self-aligned vertical stack; subwavelength metal gratings; subwavelength metal hole arrays; transmission filter; Couplings; Fabrication; Gratings; Micromechanical devices; Optical films; Optical filters; Optical surface waves; Resists; Sociotechnical systems; Sputter etching; IR Spectroscopy; Optical MEMS; Plasmonics; Subwavelength Gratings;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373868
