Effect of a Vertical Stack of Aligned Subwavelength Metal Hole Arrays on Extraordinary Transmission Spectra

Author

Provine, J. ; Kant, Rishi ; Horsley, David A. ; Howe, Roger T.

Author_Institution

Stanford Univ., Stanford

fYear

2007

fDate

Aug. 12 2007-July 16 2007

Firstpage

117

Lastpage

118

Abstract

We report on the effect of stacking a pair of metallic subwavelength hole arrays on the extraordinary transmission spectrum. A novel fabrication process was developed to create a self-aligned vertical stack of subwavelength metal gratings with precise control of the separation between the two metal films. For separations within the coupling region of the evanescent surface modes of the metal films, minor sharpening of the transmission filter characteristics was observed.

Keywords

diffraction gratings; metallic thin films; optical arrays; optical fabrication; surface plasmons; evanescent surface modes; extraordinary transmission spectra; metal films; precise control; self-aligned vertical stack; subwavelength metal gratings; subwavelength metal hole arrays; transmission filter; Couplings; Fabrication; Gratings; Micromechanical devices; Optical films; Optical filters; Optical surface waves; Resists; Sociotechnical systems; Sputter etching; IR Spectroscopy; Optical MEMS; Plasmonics; Subwavelength Gratings;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on

Conference_Location

Hualien

Print_ISBN

978-1-4244-0641-8

Type

conf

DOI

10.1109/OMEMS.2007.4373868

Filename

4373868