Title :
A resistor-based temperature sensor for MEMS frequency references
Author :
Shahmohammadi, M. ; Souri, K. ; Makinwa, Kofi A. A.
Author_Institution :
Electron. Instrum. Lab., Delft Univ. of Technol., Delft, Netherlands
Abstract :
This paper presents a CMOS temperature sensor intended for the temperature compensation of MEMS frequency references. It is based on a Wien bridge RC filter, whose phase-shift, due to the temperature dependency of the resistors used, is temperature dependent. This phase shift is then digitized by a phase domain sigma-delta modulator. The sensor was implemented in 0.18μm CMOS, consumes 36 μW and achieves 6mK resolution in a conversion time of 100msec. After batch calibration and a 3-point trim, it achieves ±0.15°C (3σ) inaccuracy over the industrial range (-40°C to 85°C).
Keywords :
CMOS integrated circuits; RC circuits; calibration; compensation; microsensors; phase shifters; resistors; sigma-delta modulation; temperature sensors; CMOS temperature sensor; MEMS frequency references; Wien bridge RC filter; calibration; phase domain sigma-delta modulator; power 36 muW; resistor-based temperature sensor; size 0.18 mum; temperature -40 degC to 85 degC; temperature compensation; temperature dependent phase-shift; time 100 ms;
Conference_Titel :
ESSCIRC (ESSCIRC), 2013 Proceedings of the
Conference_Location :
Bucharest
Print_ISBN :
978-1-4799-0643-7
DOI :
10.1109/ESSCIRC.2013.6649113
