Title :
A Lateral-shift-free LVD Microlens Scanner for Confocal Microscopy
Author :
Wu, L. ; Xie, H.
Author_Institution :
Univ. of Florida, Gainesville
fDate :
Aug. 12 2007-July 16 2007
Abstract :
We report a lateral-shift-free (LSF) large-vertical-displacement (LVD) microlens scanner for tunable focusing applications such as confocal microscopy. A polymer microlens is integrated into a lens holder actuated by a LSF-LVD microactuator. The focal plane of the microlens can be vertically displaced 0.7 mm at only 7.5 V. The observed maximum lateral shift and tilt of the microlens during the entire vertical actuation are only about 13 mum and 0.74deg respectively. The resonance frequency of the vertical motion mode is 488 Hz.
Keywords :
focal planes; microactuators; microlenses; optical focusing; optical scanners; LSF-LVD microactuator; confocal microscopy; focal plane; frequency 488 Hz; large vertical displacement; lateral shift free; lens holder; microlens scanner; polymer microlens; tunable focusing; voltage 7.5 V; Actuators; Biomedical optical imaging; Lenses; Microoptics; Optical imaging; Optical microscopy; Pistons; Polymers; Reservoirs; Voltage; Bimorph; Confocal microscopy; Large vertical displacement; Lateral shift free; Tunable microlens;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373880
