Title :
Bulk micromachined pressure sensor
Author :
Fuller, Lynn F. ; Sudirgo, Steven
Author_Institution :
Microelectron. Eng., Rochester Inst. of Technol., NY, USA
fDate :
30 June-2 July 2003
Abstract :
Bulk micromachined piezoresistive pressure sensor was designed, fabricated, packaged, and tested at RIT laboratory facility. Every aspect of the fabrication is studied thoroughly and used as an educational tool in better understanding the fabrication of MEMs devices.
Keywords :
electric sensing devices; microsensors; piezoresistive devices; pressure sensors; MEMS device fabrication; educational tool; micromachined piezoresistive pressure sensor; pressure sensor design; pressure sensor packaging; CMOS technology; Etching; Fabrication; Mechanical sensors; Microelectronics; Piezoresistance; Resistors; Sensor arrays; Space technology; Stress;
Conference_Titel :
University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial
Print_ISBN :
0-7803-7972-1
DOI :
10.1109/UGIM.2003.1225752
