• DocumentCode
    1962945
  • Title

    Growth of Li2B4O7 films on LiNbO3 and LiTaO3 substrates

  • Author

    Uno, Toru ; Mutoh, S.

  • Author_Institution
    Dept. Electr. & Electron. Eng., Kanagawa Inst. of Technol., Atsugi, Japan
  • fYear
    2012
  • fDate
    23-27 April 2012
  • Firstpage
    53
  • Lastpage
    57
  • Abstract
    Lithium niobate (LiNbO3: LN) and lithium tantalate (LiTaO3: LT) are widely used for bulk and surface acoustic wave devices because of their excellent piezoelectricity and high mechanical Q-factors. However, the frequency temperature coefficients (TCF) of these crystals are relatively large. On the contrary, lithium tetraborate (Li2B4O7: LBO) has high piezoelectricity and a positive TCF. We investigated a method of growing LBO single crystal films on LN and-/or LT substrates in order to achieve piezoelectric substrates with high electromechanical coupling and low TCF.
  • Keywords
    Q-factor; bulk acoustic wave devices; lithium compounds; piezoelectric devices; piezoelectricity; surface acoustic wave devices; LN substrates; LT substrates; Li2B4O7; LiNbO3; LiTaO3; TCF; bulk acoustic wave devices; electromechanical coupling; frequency temperature coefficients; high mechanical Q-factors; piezoelectricity; surface acoustic wave devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    European Frequency and Time Forum (EFTF), 2012
  • Conference_Location
    Gothenburg
  • Print_ISBN
    978-1-4673-1924-9
  • Type

    conf

  • DOI
    10.1109/EFTF.2012.6502331
  • Filename
    6502331
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1962945