Title :
Fabrication of Large Size Photonic Crystal Templates by Holographic Lithography Technique
Author :
Lai, Ngoc Diep ; Lin, Jian Hung ; Hsu, Chia Chen
Author_Institution :
Nat. Chung Cheng Univ., Chiayi
fDate :
Aug. 12 2007-July 16 2007
Abstract :
Multi-exposure two-beam interference technique was employed to fabricate large size defect-free 2D and 3D polymer photonic crystal (PhC) templates. Combining with a double-step laser scanning technique, designed defects could be precisely embedded to a 2D PhC template.
Keywords :
holography; light interference; optical fabrication; optical polymers; optical scanners; photolithography; photonic crystals; 2D polymer photonic crystal templates; 3D polymer photonic crystal templates; double-step laser scanning; holographic lithography; multiexposure two-beam interference; Fabrication; Holography; Interference; Laser beams; Lithography; Optical design; Periodic structures; Photonic crystals; Physics; Resists; Holography lithography; Multi-beam interference technique; Photolithography; Photonic crystal;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373887
