Title :
Extraordinary Transmission Through A Poly-SiC Membrane with Subwavelength Hole Arrays
fDate :
Aug. 12 2007-July 16 2007
Abstract :
We report on the experimental observation of extraordinary transmission (~50% for 25% fill factor) in the infrared through a suspended polycrystalline silicon carbide (poly-SiC) membrane into which is etched a subwavelength hole array. The poly-SiC was deposited by low pressure chemical vapor deposition (LPCVD), patterned with contact photolithography, and etched by reactive ion etching (RIE). Simulation of the mid-infrared transmission is broadly consistent with measurements.
Keywords :
chemical vapour deposition; light transmission; micro-optics; optical arrays; photolithography; silicon compounds; sputter etching; LPCVD; RIE; contact photolithography; extraordinary transmission; low pressure chemical vapor deposition; mid-infrared transmission; poly-SiC membrane; polycrystalline silicon carbide membrane; reactive ion etching; subwavelength hole arrays; Biomembranes; Etching; Gratings; Lithography; Optical arrays; Optical films; Optical surface waves; Particle beam optics; Scanning electron microscopy; Silicon carbide; Infra Red Spectroscopy; Optical MEMS; Plasmonics; Silicon Carbide;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373888
