Title :
Method of fitting Q-circles of measured mechanical resonators
Author_Institution :
Wireless Semicond. Div., Avago Technol., San Jose, CA, USA
Abstract :
When calculating and publishing Q values of mechanical resonators, there is a certain amount of uncertainty that exists as to the validity of the Q value claim. When different resonator technologies are compared, one concern is the method of Q extraction and the impact of local calibration. Recently, as Avago continues to make improvements in Q, the values for Rp (now closing in on 10,000Ω) becomes more questionable and a method must be put in place that gives one the best accuracy. In this work, it is assumed that any fundamental resonance can be modeled using the modified Butterworth Van Dyke (mBVD) type circuit. A ´best practices´ will be proposed.
Keywords :
Butterworth filters; resonators; Q extraction; Q value claim; Q-circles; mechanical resonators; modified Butterworth Van Dyke type circuit; Equations; Film bulk acoustic resonators; Fitting; Mathematical model; Probes; Q measurement;
Conference_Titel :
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0382-9
DOI :
10.1109/ULTSYM.2010.5935965