• DocumentCode
    1963030
  • Title

    Method of fitting Q-circles of measured mechanical resonators

  • Author

    Ruby, Rich

  • Author_Institution
    Wireless Semicond. Div., Avago Technol., San Jose, CA, USA
  • fYear
    2010
  • fDate
    11-14 Oct. 2010
  • Firstpage
    427
  • Lastpage
    430
  • Abstract
    When calculating and publishing Q values of mechanical resonators, there is a certain amount of uncertainty that exists as to the validity of the Q value claim. When different resonator technologies are compared, one concern is the method of Q extraction and the impact of local calibration. Recently, as Avago continues to make improvements in Q, the values for Rp (now closing in on 10,000Ω) becomes more questionable and a method must be put in place that gives one the best accuracy. In this work, it is assumed that any fundamental resonance can be modeled using the modified Butterworth Van Dyke (mBVD) type circuit. A ´best practices´ will be proposed.
  • Keywords
    Butterworth filters; resonators; Q extraction; Q value claim; Q-circles; mechanical resonators; modified Butterworth Van Dyke type circuit; Equations; Film bulk acoustic resonators; Fitting; Mathematical model; Probes; Q measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2010 IEEE
  • Conference_Location
    San Diego, CA
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4577-0382-9
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2010.5935965
  • Filename
    5935965