DocumentCode
1963030
Title
Method of fitting Q-circles of measured mechanical resonators
Author
Ruby, Rich
Author_Institution
Wireless Semicond. Div., Avago Technol., San Jose, CA, USA
fYear
2010
fDate
11-14 Oct. 2010
Firstpage
427
Lastpage
430
Abstract
When calculating and publishing Q values of mechanical resonators, there is a certain amount of uncertainty that exists as to the validity of the Q value claim. When different resonator technologies are compared, one concern is the method of Q extraction and the impact of local calibration. Recently, as Avago continues to make improvements in Q, the values for Rp (now closing in on 10,000Ω) becomes more questionable and a method must be put in place that gives one the best accuracy. In this work, it is assumed that any fundamental resonance can be modeled using the modified Butterworth Van Dyke (mBVD) type circuit. A ´best practices´ will be proposed.
Keywords
Butterworth filters; resonators; Q extraction; Q value claim; Q-circles; mechanical resonators; modified Butterworth Van Dyke type circuit; Equations; Film bulk acoustic resonators; Fitting; Mathematical model; Probes; Q measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2010 IEEE
Conference_Location
San Diego, CA
ISSN
1948-5719
Print_ISBN
978-1-4577-0382-9
Type
conf
DOI
10.1109/ULTSYM.2010.5935965
Filename
5935965
Link To Document