Design Technique of Magnetic Suspension for Vibration Free Table

This paper proposes the design method of a magnetic suspension that is controlled actively on the exterior vibrations by low frequencies. The magnetic suspension is able to compensate the vibrations with individual controls unlike a mechanical suspension. In the magnetic suspension, two characteristics are required. That is, firstly, magnetic motive force (MMF) by armature winding must be increased linearly. Lastly, the other is same output force as direction of MMF. In this paper, response surface method combined with experimental design is applied to invested the characteristics and optimize the magnetic suspension for vibration free table