Title :
A Study on Optical Diffraction Characteristics of Skewed MEMS Pitch Tunable Gratings
Author :
Takahashi, K. ; Suzuki, K. ; Funaki, H. ; Itaya, K. ; Fujita, H. ; Toshiyoshi, H.
Author_Institution :
Univ. of Tokyo, Tokyo
fDate :
Aug. 12 2007-July 16 2007
Abstract :
This paper presents a pitch tunable grating light valve integrated with high-voltage (40 V) driver circuits that target for image projection display devices. In our work, optical light angle is modulated by changing the period of the MEMS grating pixel by means of electrostatic actuation. In addition, we developed a MEMS grating light valve with a skewed angle for elimination of the inter-spot crosstalk. The skewed gratings were found to spread the +/- 1st order diffraction off the axis. Optical diffraction angles of 6.6 degrees (OFF-state) and 3.3 degrees (ON-state) were obtained.
Keywords :
diffraction gratings; electrostatic actuators; light valves; micro-optomechanical devices; optical crosstalk; optical tuning; electrostatic actuation; image projection display devices; light valve; optical diffraction; pitch tunable gratings; skewed MEMS grating pixel; voltage 40 V; Diffraction gratings; Displays; Driver circuits; Electrostatic actuators; Micromechanical devices; Optical crosstalk; Optical diffraction; Optical modulation; Tunable circuits and devices; Valves; Diffraction gratings; on-chip electronics; pitch tuning; projection display; skewed gratings;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373897
