Title :
Ultra flat high resolution microscanners
Author :
Hsu, Shu-Ting ; Klose, Thomas ; Drabe, Christian ; Wolter, Alexander ; Schenk, Harald
Author_Institution :
Fraunhofer Inst. for Photonic Microsyst., Dresden
fDate :
Aug. 12 2007-July 16 2007
Abstract :
We present a high frequency (30 kHz) micro-scanner with 27 nm dynamic deformation at plusmn10deg mechanical scan angle. To achieve that, a dry-wet combination process is utilized to fabricate reinforcement frames for scanner flatness improvement.
Keywords :
deformation; micromirrors; optical scanners; dry-wet combination process; dynamic deformation; frequency 30 kHz; mechanical scan angle; size 27 nm; ultra flat high resolution microscanners; Displays; Dry etching; Fabrication; Fasteners; Frequency; Micromirrors; Mirrors; Optical design; Protection; Resists; backside reinforcement; display scanner; dynamic deformation; micromirror;
Conference_Titel :
Optical MEMS and Nanophotonics, 2007 IEEE/LEOS International Conference on
Conference_Location :
Hualien
Print_ISBN :
978-1-4244-0641-8
DOI :
10.1109/OMEMS.2007.4373908
