Title :
Characterization and Control of the OMVPE Process Using In-situ X-ray Analysis Techniques
Author :
Kisker, D.W. ; Stephenson, G.B. ; Fuoss, P.H. ; Lamelas, F.J. ; Imperatori, P. ; Brennan, S.
Author_Institution :
AT&T Bell Laboratories, Murray Hill, NJ
Keywords :
Art; Condition monitoring; Gallium arsenide; Inductors; Molecular beam epitaxial growth; Surface reconstruction; Synchrotron radiation; Temperature; Time measurement; X-ray diffraction;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664916
