Title :
The Pyrolysis of Precursors for Gaas Mocvd Studied by In-situ and Ex-situ Fourier Transform Infared Spectroscopy
Author :
Armstrong, S.R. ; Hoare, R.D. ; Pemble, M.E. ; Povey, I.M. ; Stafford, A. ; Taylor, A.G. ; Williams, J.O.
Author_Institution :
Department of Chemistry and Centre for Electronic Materials, UMIST, UK
Keywords :
Chemistry; Fourier transforms; Gallium arsenide; Inductors; Laboratories; MOCVD; Probes; Sampling methods; Spectroscopy; Temperature;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664918
