Fabrication of SAW resonators on Quartz and Langasite using Nano-Imprint Lithography

The development of new technological approaches such as Nano-Imprint Lithography (NIL) is expected to open new perspectives in the cost-effective high resolution fabrication of SAW devices. Resonators operating near 380 MHz and near 434 MHz have tested respectively on Langasite and Quartz. Q factor in excess of 12000 have been measured on Langasite and frequency distribution within one 4" wafer was found smaller or equal 200 kHz for LGS and smaller than 100 kHz for Quartz. Finger width smaller than 400 nm also have been successfully achieved.