Title :
Surface Reactions of Tris(oimethylamino) Arsine During Mombe of Gaas
Author :
Lu, Jiong Ping ; Salim, Sateria ; Jensen, Klavs F. ; Bohling, David A.
Author_Institution :
Departments of Chemical Engineering and Materials, Science and Engineering Massachusetts Institute of Technology
Keywords :
Bonding; Ducts; Ear; Epitaxial growth; Epitaxial layers; Gallium arsenide; Hydrogen; Nitrogen; Read only memory; Temperature;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664919
