Title :
A self-referenced VCO-based temperature sensor with 0.034°C/mV supply sensitivity in 65nm CMOS
Author :
Anand, Tejasvi ; Makinwa, Kofi A. A. ; Hanumolu, Pavan Kumar
Author_Institution :
Univ. of Illinois, Urbana, IL, USA
Abstract :
A VCO-based temperature sensor with low supply sensitivity is presented. Fabricated in a 65nm CMOS process, the 0.004mm2 prototype operates with 1V supply and achieves a supply sensitivity of 0.034°C/mV and an inaccuracy of +0.9°C/-0.9°C and +2.3°C/-2.3°C from 0-100°C after 2-point calibration, with and without static non-linearity correction, respectively. For (programmable) resolutions of 1°C-to-0.3°C, the sensor draws 1nJ-to-3.4nJ per conversion, respectively.
Keywords :
CMOS analogue integrated circuits; calibration; integrated circuit manufacture; temperature sensors; voltage-controlled oscillators; CMOS process; VCO-based temperature sensor; size 0.004 mm; size 65 nm; static nonlinearity correction; supply sensitivity; temperature 0 degC to 100 degC; two-point calibration; voltage-controlled oscillators; Clocks; Frequency measurement; MOSFET; Semiconductor device measurement; Sensitivity; Temperature measurement; Temperature sensors;
Conference_Titel :
VLSI Circuits (VLSI Circuits), 2015 Symposium on
Conference_Location :
Kyoto
Print_ISBN :
978-4-86348-502-0
DOI :
10.1109/VLSIC.2015.7231257
