Title :
Living daily with "monster" probe cards
Author :
Pietzschmann, Frank
Author_Institution :
Infineon Technol. AG, Dresden, Germany
Abstract :
This not so seriously named title gives a hint to the breathtaking developments that have taken place in probing technologies during the last eight years. Breathtaking in two aspects: development speed and technology changes. High throughput and a fast ramp up in a 300 mm wafer test are connected with the using of ultrahigh parallel probe cards. Hard daily work and new thinking is necessary to earn these fruits really. To have a high production usage is a fight. What\´s new and what are the main challenges as well? At the beginning stand a new culture of partnership between probe card manufacturer and customer. It will be shown that this is a cooperation in each stage, connected with compromise less know how exchange and communication. The expanded engineering tasks and approaches make a transition from "probe card" to "probing process" engineering necessary. Finally a whole new handling concept is indispensable to make the LAA probe card usage successful.
Keywords :
electron device manufacture; probes; smart cards; 300 mm; probe card manufacturer; probing process; probing technology; production usage; smart cards; ultrahigh parallel probe cards; wafer test; Costs; Flash memory; Logic; Manufacturing; Needles; Probes; Production; Semiconductor device manufacture; Testing; Throughput;
Conference_Titel :
Electronics Manufacturing Technology Symposium, 2003. IEMT 2003. IEEE/CPMT/SEMI 28th International
Print_ISBN :
0-7803-7933-0
DOI :
10.1109/IEMT.2003.1225941