Very High Q, NEMS Inductor for 12GHz Wireless Sensor Applications

Author

Khalid, N. ; Singh, J. ; Le, H.P. ; Shah, K. ; Devlin, J. ; Sauli, Z.

Author_Institution

La Trobe Univ., Bundoora, VIC, Australia

fYear

2010

fDate

13-15 Jan. 2010

Firstpage

319

Lastpage

324

Abstract

This paper presents the design and optimisation of high quality (Q) factor inductors using Micro/Nano Electro-Mechanical Systems (NEMS/MEMS) technology for 10 GHz to 20 GHz frequency band. Three inductors have been designed with rectangular, circular and symmetric topologies. Comparison has been made amongst the three to determine the best Q-factor. Inductors are designed on Silicon-on-Sapphire (SOS) because of its advantages including high resistivity and low parasitic capacitance. The effects of various parameters such as outer diameter (OD), the width of metal traces (W), the thickness of the metal (T) and the air gap (AG) on the Q-factor and inductance performances are thoroughly investigated. Results indicate that the symmetric inductor has highest Q-factor with peak Q of 192 at 12 GHz for a 1.13 nH.

Keywords

Q-factor; inductors; micromechanical devices; microwave devices; nanoelectromechanical devices; optimisation; sapphire; silicon; wireless sensor networks; NEMS inductor; NEMS/MEMS technology; circular topology; frequency 10 GHz to 20 GHz; microelectromechanical systems; nanoelectromechanical systems; optimisation; rectangular topology; silicon-on-sapphire; symmetric topology; very high quality factor; wireless sensor applications; Conductivity; Design optimization; Frequency; Inductors; Micromechanical devices; Nanoelectromechanical systems; Parasitic capacitance; Q factor; Topology; Wireless sensor networks; High Q inductor; Micro/Nano Electro-Mechanical Systems (MEMS/NEMS); Silicon-on-sapphire;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Design, Test and Application, 2010. DELTA '10. Fifth IEEE International Symposium on

Conference_Location

Ho Chi Minh City

Print_ISBN

978-0-7695-3978-2

Electronic_ISBN

978-1-4244-6026-7

Type

conf

DOI

10.1109/DELTA.2010.45

Filename

5438670