• DocumentCode
    1966718
  • Title

    Femtosecond laser micromachining of sapphire

  • Author

    Kim, K.-S. ; Jones, D. ; Bente, E. ; Girkin, J.M. ; Dawson, M.D.

  • Author_Institution
    Inst. of Photonics, Strathclyde Univ., Glasgow, UK
  • Volume
    2
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    762
  • Abstract
    50 fs pulse laser micromachining of sapphire has been demonstrated. The smooth and clean features and high ablation rate have proven the suitability of this technique for micro-scale machining of this technologically important material
  • Keywords
    high-speed optical techniques; laser ablation; laser beam machining; micromachining; sapphire; substrates; Al2O3; III-nitride device substrate; air breakdown effect; deep grooves; femtosecond laser micromachining; flat bottom surfaces; gratings; high-aspect-ratio grooves; laser ablation; narrow grooves; sapphire; single-side-polished wafers; trenches; Chemical lasers; Laser ablation; Laser beams; Laser mode locking; Machining; Micromachining; Optical pulses; Power generation; Power lasers; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE
  • Conference_Location
    San Diego, CA
  • ISSN
    1092-8081
  • Print_ISBN
    0-7803-7105-4
  • Type

    conf

  • DOI
    10.1109/LEOS.2001.969038
  • Filename
    969038
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1966718