• DocumentCode
    1966757
  • Title

    Non-contact surface charge density profiles measurement on top and bottom of a charged film

  • Author

    Oda, Tetsuji ; Sato, Yasuo

  • Author_Institution
    Dept. of Electr. Eng., Tokyo Univ., Japan
  • fYear
    1989
  • fDate
    1-5 Oct. 1989
  • Firstpage
    1940
  • Abstract
    Equivalent surface charge density profiles on the top and bottom surfaces of corona-charged films were measured using a surface potential voltmeter with a horizontal resolution of about 2 mm and a laser displacement meter with a vertical resolution of 10 mu m. A personal computer controlled the sample position with a resolution of a few tens of microns. The resolution was determined by the digital X-Y stage and the distance of the backside ground electrode from the bottom of the charged film. Surface potential profiles at several positions between the ground electrode (back) and the sample film were recorded, and the equivalent surface charge density profiles on the top and the bottom of the film were calculated and plotted automatically. Some interesting electrostatic phenomena related to the charge behavior of the films are reported: for example, the back side surface charge was affected by the surface discharge even if no ground electrode was nearby.<>
  • Keywords
    charge measurement; computerised instrumentation; corona; electrostatic discharge; insulating thin films; microcomputer applications; polymers; surface potential; voltage measurement; ESD; backside ground electrode; computerised instrumentation; corona-charged films; electrostatic discharge; electrostatic phenomena; insulating thin films; laser displacement meter; personal computer; polymers; surface charge density profiles measurement; surface potential voltmeter; Charge measurement; Current measurement; Density measurement; Displacement measurement; Electrodes; Electrostatics; Microcomputers; Surface discharges; Vertical cavity surface emitting lasers; Voltmeters;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Industry Applications Society Annual Meeting, 1989., Conference Record of the 1989 IEEE
  • Conference_Location
    San Diego, CA, USA
  • Type

    conf

  • DOI
    10.1109/IAS.1989.96904
  • Filename
    96904