Title :
Sensitivity analysis of eddy current sensor parameters for non-destructive measurement of zirconium oxide thin film using 3D finite element
Author :
Abakar, A. ; Verite, J.C. ; Cauvin, R.
Author_Institution :
EDF R&D, Clamart
Abstract :
The study consist on a sensitivity analysis of the effect of some parameters for an eddy current sensor measurement process. A 3D finite element method has been used to compute the magnetic flux for different configuration of the sensor and the uncertainty analysis has been treated
Keywords :
eddy currents; electric sensing devices; finite element analysis; magnetic flux; sensitivity analysis; thin films; zirconium compounds; 3D finite element method; ZrO2; eddy current sensor parameters; magnetic flux; nondestructive measurement; sensitivity analysis; uncertainty analysis; zirconium oxide thin film; Conductivity; Current measurement; Eddy currents; Finite element methods; Magnetic flux; Magnetic sensors; Probes; Sensitivity analysis; Thin film sensors; Zirconium;
Conference_Titel :
Electromagnetic Field Computation, 2006 12th Biennial IEEE Conference on
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0320-0
DOI :
10.1109/CEFC-06.2006.1633216
