Title :
Methodology and tool for generating semi-analytical models Used to pre-design electromagnetic MEMS (Mag-MEMS)
Author :
Rakotoarison, Harijaona L. ; Delinchant, B. ; Cugat, O.
Author_Institution :
Laboratoire d´´Electrotechnique de Grenoble, ENSIEG INPG, St. Martin d´´Heres
Abstract :
Modeling electromagnetic MEMS (Mag-MEMS) with semi-analytical models is possible, and can be automated because they can be decomposed into primitive geometries. We present a methodology and a tool which generates automatically the physical expressions needed to produce a fast model dedicated to the optimization process of Mag-MEMS. Our magnetostatic, linear approach uses analytical and semi-analytical expressions of fields radiated by elementary shapes of magnets and conductors
Keywords :
electromagnetic devices; electromagnetic waves; magnetostatics; micromechanical devices; optimisation; conductors; electromagnetic MEMS; elementary shapes; linear approach; magnetostatic; magnets; optimization process; Conductors; Electromagnetic modeling; Geometry; Magnetic analysis; Magnetostatics; Magnets; Micromechanical devices; Optimization methods; Shape; Solid modeling;
Conference_Titel :
Electromagnetic Field Computation, 2006 12th Biennial IEEE Conference on
Conference_Location :
Miami, FL
Print_ISBN :
1-4244-0320-0
DOI :
10.1109/CEFC-06.2006.1633234
