DocumentCode
1968905
Title
Real-time displacement measurement by use of a coaxial type of laser diode interferometer
Author
Suzuki, Takamasa ; Sato, Shohei ; Sasaki, Osami
Author_Institution
Grad. Sch. of Sci. & Technol., Niigata Univ., Niigata, Japan
fYear
2009
fDate
30-3 Aug. 2009
Firstpage
1
Lastpage
2
Abstract
A real-time displacement sensor based on a laser diode interferometer that has a coaxial structure is proposed and demonstrated. Several measurements indicate measurement accuracy of 0.1 mum.
Keywords
displacement measurement; light interferometers; optical sensors; optical variables measurement; semiconductor lasers; laser diode interferometer; real-time displacement measurement; real-time displacement sensor; wavelength 0.1 mum; Coaxial components; Diode lasers; Displacement measurement; Interference; Mechanical sensors; Optical feedback; Optical interferometry; Optical sensors; Optical signal processing; Packaging; displacement sensor; interferometer; laser diode;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-3829-7
Electronic_ISBN
978-1-4244-3830-3
Type
conf
DOI
10.1109/CLEOPR.2009.5292076
Filename
5292076
Link To Document