Title :
Real-time displacement measurement by use of a coaxial type of laser diode interferometer
Author :
Suzuki, Takamasa ; Sato, Shohei ; Sasaki, Osami
Author_Institution :
Grad. Sch. of Sci. & Technol., Niigata Univ., Niigata, Japan
Abstract :
A real-time displacement sensor based on a laser diode interferometer that has a coaxial structure is proposed and demonstrated. Several measurements indicate measurement accuracy of 0.1 mum.
Keywords :
displacement measurement; light interferometers; optical sensors; optical variables measurement; semiconductor lasers; laser diode interferometer; real-time displacement measurement; real-time displacement sensor; wavelength 0.1 mum; Coaxial components; Diode lasers; Displacement measurement; Interference; Mechanical sensors; Optical feedback; Optical interferometry; Optical sensors; Optical signal processing; Packaging; displacement sensor; interferometer; laser diode;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292076
