• DocumentCode
    1969004
  • Title

    Channeled spectropolarimetry and its application for the spectroscopic ellipsometry

  • Author

    Oka, K. ; Okabe, H. ; Hayakawa, M. ; Matoba, J. ; Naito, H.

  • Author_Institution
    Div. of Appl. Phys., Hokkaido Univ., Sapporo, Japan
  • fYear
    2009
  • fDate
    30-3 Aug. 2009
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Channeled Spectropolarimetry is a snapshot method to measure the spectrally-resolved state of polarization of light. The basic features of the method are reviewed in this presentation. Its application for the spectroscopic ellipsometry is also described.
  • Keywords
    ellipsometry; light polarisation; polarimetry; spectroscopy; channeled spectropolarimetry; light polarization; spectroscopic ellipsometry; Birefringence; Ellipsometry; Geometrical optics; Optical polarization; Optical retarders; Prototypes; Spectroscopy; Stokes parameters; Thickness measurement; Thin films; Birefringence; Ellipsometry; Spectroscopic Polarimetry; Thin Film;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-3829-7
  • Electronic_ISBN
    978-1-4244-3830-3
  • Type

    conf

  • DOI
    10.1109/CLEOPR.2009.5292081
  • Filename
    5292081
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1969004