Title :
Channeled spectropolarimetry and its application for the spectroscopic ellipsometry
Author :
Oka, K. ; Okabe, H. ; Hayakawa, M. ; Matoba, J. ; Naito, H.
Author_Institution :
Div. of Appl. Phys., Hokkaido Univ., Sapporo, Japan
Abstract :
Channeled Spectropolarimetry is a snapshot method to measure the spectrally-resolved state of polarization of light. The basic features of the method are reviewed in this presentation. Its application for the spectroscopic ellipsometry is also described.
Keywords :
ellipsometry; light polarisation; polarimetry; spectroscopy; channeled spectropolarimetry; light polarization; spectroscopic ellipsometry; Birefringence; Ellipsometry; Geometrical optics; Optical polarization; Optical retarders; Prototypes; Spectroscopy; Stokes parameters; Thickness measurement; Thin films; Birefringence; Ellipsometry; Spectroscopic Polarimetry; Thin Film;
Conference_Titel :
Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09. Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-3829-7
Electronic_ISBN :
978-1-4244-3830-3
DOI :
10.1109/CLEOPR.2009.5292081
