Title :
The Role of Technology CAD in Early Process Development
Author_Institution :
LSI Logic Corporation, USA
fDate :
11-13 September 2001
Keywords :
Calibration; Computational modeling; Computer simulation; Doping profiles; Geometry; Large scale integration; Manufacturing; Predictive models; Silicon on insulator technology; Solid modeling;
Conference_Titel :
Solid-State Device Research Conference, 2001. Proceeding of the 31st European
Print_ISBN :
2-914601-01-8
DOI :
10.1109/ESSDERC.2001.195203
