DocumentCode

1969990

Title

Thin (2-4nm) Medium and High-k Dielectrica: A Challenge for Physical Metrology

Author

Vandervorst, W.

Author_Institution

IMEC, Belgium

fYear

2001

fDate

11-13 September 2001

Firstpage

59

Lastpage

60

Keywords

High K dielectric materials; High-K gate dielectrics; Metrology;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2001. Proceeding of the 31st European

Print_ISBN

2-914601-01-8

Type

conf

DOI

10.1109/ESSDERC.2001.195204

Filename

1506586