DocumentCode

1970452

Title

Carbon Implanted Halo for Super Halo Characteristic NFETs in Bulk and SOI

Author

Ellis-Monaghan, John ; Lee, Kam-Leung ; Ieong, Meikei ; Yang, Isabel

Author_Institution

IBM Microelectronics, Essex Junction, USA

fYear

2001

fDate

11-13 September 2001

Firstpage

155

Lastpage

158

Keywords

Annealing; Boron; Implants; Subthreshold current; Temperature; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2001. Proceeding of the 31st European

Print_ISBN

2-914601-01-8

Type

conf

DOI

10.1109/ESSDERC.2001.195224

Filename

1506606