Laser inspection for surface acoustic wave performance in SAW device

Author

Jang, Won Kweon ; Park, Jun Oh

Author_Institution

Div. of Electron., Comput. & Commun. Eng., Hanseo Univ., South Korea

fYear

2010

fDate

8-12 Dec. 2010

Firstpage

284

Lastpage

285

Abstract

Unlike the electric method capable of checking only product defect, the real time optical metrology is suggested for measuring and visualizing vibration with respect to position of surface acoustic wave in RF device. The measuring limits and conditions for surface acoustic wave are given, and the interference and diffraction due to RF signal are analyzed by optical interpretation. A single mode laser and a 105MHz-center-frequency repeater filter were employed for experiments and theoretical analysis. In this paper, the optical metrology providing visual energy distribution and real time inspection for surface acoustic wave is proposed for development of high quality multi-service and multi-frequency RF module.

Keywords

interference; measurement by laser beam; optical filters; surface acoustic wave devices; RF signal; SAW device; frequency 105 MHz; laser inspection; optical interpretation; product defect; real time optical metrology; repeater filter; single mode laser; surface acoustic wave; visual energy distribution; Acoustic waves; Diffraction; Optical diffraction; Optical filters; Optical surface waves; Radio frequency; Surface acoustic wave devices; RF device; diffraction; interference; real time; surface acoustic wave; visualization;

fLanguage

English

Publisher

ieee

Conference_Titel

Communications and Photonics Conference and Exhibition (ACP), 2010 Asia

Conference_Location

Shanghai

Print_ISBN

978-1-4244-7111-9

Type

conf

DOI

10.1109/ACP.2010.5682722

Filename

5682722