Design of Integrated RF Modules with Process Control Monitors on Liquid Crystalline Polymer Substrates for Large Volume Manufacturing

Author

Seo, Chung-Seok ; Min, Sung-Hwan ; Ward, Chris ; Wallace, Peter ; White, George ; Swaminathan, Madhavan

Author_Institution

Jacket Micro Devices, Inc., Atlanta, GA

fYear

2007

fDate

11-14 Dec. 2007

Firstpage

1

Lastpage

4

Abstract

In this paper, we present process control monitor (PCM) design and analysis for integrated RF modules. Through PCM integration, the measured substrate yield of the devices was greater than 90% which also agreed with the Monte Carlo simulations.

Keywords

Monte Carlo methods; integrated circuit design; liquid crystal polymers; manufacturing processes; multilayers; process control; process monitoring; radiofrequency integrated circuits; Monte Carlo simulation; integrated RF modules; large volume manufacturing; liquid crystalline polymer substrates; organic multilayers; process control monitors; Circuit testing; Costs; Crystallization; Liquid crystal polymers; Manufacturing processes; Nonhomogeneous media; Phase change materials; Process control; Radio frequency; Substrates; High-K; LCP; Measurement; Modeling; Module design; Multilayer organic; PCM; Test; Yield; component;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. APMC 2007. Asia-Pacific

Conference_Location

Bangkok

Print_ISBN

978-1-4244-0748-4

Electronic_ISBN

978-1-4244-0749-1

Type

conf

DOI

10.1109/APMC.2007.4554561

Filename

4554561