DocumentCode
1971225
Title
Novel Selective Area Growth of AIGaAs and AIAs with HCI Gas by MOVPE
Author
Shimoyama, Kenji ; Fujii, Katsushi ; Gotoh, Hideki
Author_Institution
Tsukuba Opto-Electronics Laboratory, Japan
fYear
1992
fDate
8-11 Jun 1992
Firstpage
102
Lastpage
103
Keywords
Artificial intelligence; Epitaxial growth; Epitaxial layers; Gallium arsenide; Human computer interaction; Optical device fabrication; Optical devices; Optical films; Passivation; Scanning electron microscopy;
fLanguage
English
Publisher
ieee
Conference_Titel
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN
0-87942-652-7
Type
conf
DOI
10.1109/MOVPE.1992.664961
Filename
664961
Link To Document