Three-dimensional magneto-optic near-field mapping over 10-50 μm-scale line and space circuit patterns

Author

Yamazaki, E. ; Wakana, S. ; Kishi, M. ; Iwanami, M. ; Hoshino, S. ; Tsuchiya, M.

Author_Institution

Dept. of Electron. Eng., Univ. of Tokyo, Japan

Volume

1

fYear

2001

fDate

2001

Firstpage

318

Abstract

We report on the first fine x-z mapping experiment of magnetic near-field distribution over fine circuit patterns. Required three-dimensional (3D) spatial resolution was brought about by utilizing the fiber-edged magneto-optic (FEMO) probe structure. The 3D mapping technique of electromagnetic fields provides more information about finer variations in the vertical (z) direction in cases of finer circuits. The electro-optic/magneto-optic (EO/MO) probing techniques are promising toward this purpose since one can take its attractive natures such as wide-bandwidth, high-sensitivity, low invasiveness, and relatively high-spatial-resolution

Keywords

fibre optic sensors; image resolution; integrated circuit testing; magneto-optical sensors; microwave integrated circuits; sensitivity; 10 to 50 micron; 3D magneto-optic near-field mapping; 3D mapping technique; electro-optic/magneto-optic probing techniques; electromagnetic fields; fiber-edged magneto-optic probe structure; fine circuit patterns; fine x-z mapping experiment; high-sensitivity; high-spatial-resolution; low invasiveness; space circuit patterns; wide-bandwidth; Crystals; Electromagnetic compatibility; Electromagnetic fields; Frequency; Magnetic circuits; Magnetic heads; Microwave integrated circuits; Optical fibers; Probes; Spatial resolution;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society, 2001. LEOS 2001. The 14th Annual Meeting of the IEEE

Conference_Location

San Diego, CA

ISSN

1092-8081

Print_ISBN

0-7803-7105-4

Type

conf

DOI

10.1109/LEOS.2001.969303

Filename

969303