DocumentCode

1971869

Title

Leakage Current in Ultra Thin Oxides: SILC or Soft Breakdown?

Author

Cester, A. ; Bandiera, L. ; Paccagnella, A. ; Ghidini, G.

Author_Institution

University of Padova, Italy

fYear

2001

fDate

11-13 September 2001

Firstpage

463

Lastpage

466

Keywords

Electric breakdown; Leakage current;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference, 2001. Proceeding of the 31st European

Print_ISBN

2-914601-01-8

Type

conf

DOI

10.1109/ESSDERC.2001.195301

Filename

1506683