• DocumentCode
    1971937
  • Title

    A Model of Transport Phenomena and Chemical Reactions in Atomic Layer Epitaxy

  • Author

    Merchant, Tushar P. ; Jensen, Klavs F.

  • Author_Institution
    Departments of Chemical Engineering and Materials Science and Engineering, Massachusetts Institute of Technology
  • fYear
    1992
  • fDate
    8-11 Jun 1992
  • Firstpage
    107
  • Lastpage
    108
  • Keywords
    Atomic layer deposition; Chemicals; Chemistry; Epitaxial growth; Gallium arsenide; Heat transfer; Inductors; Materials science and technology; Semiconductor process modeling; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
  • Print_ISBN
    0-87942-652-7
  • Type

    conf

  • DOI
    10.1109/MOVPE.1992.664964
  • Filename
    664964
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1971937