Title :
The Decomposition of Tertiarybutyl Phosphine and Related Precursors During lnP MOCVD Growth Studied by FTIR Spectroscopy
Author :
Fan, G.H. ; Hoare, R.D. ; Pemble, M.E. ; Povey, I.M. ; Williams, J.O.
Author_Institution :
Department of Chemistry and Centre for Electronic Materials, UK
Keywords :
Chemistry; Fourier transforms; Indium phosphide; Inductors; Infrared spectra; Laboratories; MOCVD; Polymers; Spectroscopy; Temperature;
Conference_Titel :
Metalorganic Vapor Phase Epitaxy, 1992. Sixth International Conference
Print_ISBN :
0-87942-652-7
DOI :
10.1109/MOVPE.1992.664966
